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(2) Non crystalline solid electrolytes such as LPON

LiPON is a partially nitrided lithium phosphate, a solid electrolyte with excellent comprehensive performance. The room temperature ion conductivity of LiPON membrane is related to its N content. The optimal proportion of LiPON electrolyte membrane synthesized is LibPOxNaus, and its ion conductivity can reach 3.3&times at 25 ℃; 10-5S/cm, wide electrochemical stability window, up to 5.5V, activation energy 0.54eV. LiPON is a thin film obtained by sputtering in N2 atmosphere, and its chemical and electrochemical properties are stable. It can be matched with positive electrodes such as LiCo02 and LiMnO4, as well as negative electrodes such as metal lithium and lithium alloys, making it a crucial electrolyte for the development of thin film lithium-ion batteries.

3. Research on Positive and Negative Film

(1) Research on Positive Electrode Thin Films

The cathode materials of thin-film lithium-ion batteries were initially replaced by higher potential cathode materials such as Ti2S3, MoS2, MnO ₂, etc., such as V2O3, LiCoO2, LiNiO2, and LiMn2O4. The thin film preparation technology has also been continuously improved and added from the initial evaporation, spin coating, sputtering and other technologies.

Vanadium oxide and lithium vanadate cathode materials have always been a crucial research direction for cathode materials. As cathode materials for thin film lithium-ion batteries, they have the advantage of not annealing and can be produced on some substrates that are not resistant to high temperatures.

LiCo04 is a positive electrode material (ITN) used in commercial thin film lithium-ion batteries. Many battery systems in the United States use it as a positive electrode thin film material, which has advantages such as high specific energy and good cycling performance, and research is very active. The LiCoO4 thin films deposited by magnetron sputtering or Pulsed laser deposition are amorphous, with low capacity and poor cycling performance. The LiCoO2 thin films with high capacity and good cycling performance can be obtained only after annealing above 700 ℃, which limits the selection of substrate materials for Li-Co02 electrodes.

Although the discharge performance of LiCoO4 nanocrystals is not as good as that of LiCoO2 films annealed at 700 ℃, it has significantly improved performance compared to unannealed films, and has certain practical value for substrates that are not resistant to high temperatures such as polymers. Park et al. added bias voltage in RF magnetron sputtering to prepare materials with certain capacity and cycling ability without annealing.

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